e-Mission Hollow Cathodes瀏覽數: 4401
e-Mission Hollow cathode (中空陰極)結構緊湊，重量輕便，可以安裝在離子源或真空系統的側面，相對於燈絲的模式有更長的使用壽命，這在運行忌諱突然中斷的複雜工藝時，是非常有意義的。而且中空陰極 (Hollow cathode) 輻射的熱量更低，可以使襯底獲得更低的溫度，這相對於對溫度敏感的襯底材料而言，中空陰極的優勢是不言而喻的。
|
Model |
HFx |
SHC1000 |
DSHC1000 |
|
Cathode |
Yes |
Yes |
Yes |
|
Neutralizer |
Yes |
Yes |
Yes |
|
Orientation |
Vertical / Horizontal |
Vertical / Horizontal |
Vertical / Horizontal |
|
Regulation |
Emission |
Emission |
Emission |
|
Operational gas |
None |
Inert |
Inert |
|
Process gases |
Inert & reactive |
Inert & reactive |
Inert & reactive |
|
Power Controller |
FC100x |
e- Mission Power Pack |
e- Mission Power Pack |
|
Model |
MHC1000 |
LHC1000 |
|
Cathode |
Yes |
Yes |
|
Neutralizer |
Yes |
Yes |
|
Orientation |
Vertical / Horizontal |
Vertical / Horizontal |
|
Regulation |
Emission |
Emission |
|
Operational gas |
Inert |
Inert |
|
Process gases |
Inert & reactive |
Inert & reactive |
|
Power Controller |
e- Mission Power Pack |
e- Mission Power Pack |
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